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题名 软磁薄膜的巨磁阻抗效应及高频磁性研究
姓名 孙晓君
院系 物理科学与技术学院
专业 凝聚态物理
学位名称 理学硕士
外文题名 Giant Magnetoimpedance Effect and High Frequency Properties of Soft Magnetic Films
第一导师姓名 刘青芳
关键词 软磁薄膜;巨磁阻抗效应;铁磁共振;阻尼
外文关键词 soft magnetic film;giant magnetoimpedance effect;FMR;damping
学科 理学
摘要 软磁薄膜由于其便于小型化、集成化和标准化的优势,日益成为磁性传感器和高频磁性元件的核心材料。巨磁阻抗效应(GMI)作为一种具有高信号强度和灵敏度电磁效应具有潜在的应用前景。在高频电子器件中,具有高饱和磁化强度和大的面内各向异性的软磁薄膜成为重要研究材料。 本文中,针对GMI效应研究,利用磁控溅射方法制备了FeNi/Cu/FeNi薄膜和在这种结构薄膜中引入一层或两层NiZn铁氧体夹层的多层膜;在铁基非晶带表面沉积了NiZn铁氧体。针对高频磁性研究,利用斜溅射方法制备了Fe75.5Cu1Nb3Si3.5B7薄膜。主要研究结果如下: 1.NiZn铁氧体夹层对FeNi/Cu/FeNi薄膜巨磁阻抗效应影响:在FeNi/Cu/FeNi中引入一层NiZn铁氧体时,巨磁阻抗效应增强;而引入两层NiZn铁氧体的薄膜中的GMI效应没有明显增强。 2.NiZn铁氧体包覆对铁基非晶带巨磁阻抗效应影响:在非晶带光滑面溅射了一层NiZn铁氧体后,其GMI效应相对于未包覆的非晶带得到显著增强。 3.Fe75.5Cu1Nb3Si3.5B7薄膜的面内磁各向异性的调节:在不同斜溅射角度下制备的薄膜中,均呈现面内各向异性。铁磁共振测试发现薄膜具有两个共振峰。 4.斜溅射调控Fe75.5Cu1Nb3Si3.5B7薄膜的阻尼因子:在不同斜溅射角度下制备的薄膜中,有效阻尼因子随斜角度的增大而增大。倾斜角度在3o~26o时,本征阻尼因子保持在0.016左右;倾斜角度达到32o时,本征阻尼因子为0.037。
外文摘要 Soft magnetic films play a core role in magnetic sensors and high frequency devices, due to the advantage of miniaturization, integration and standardization. Giant magnetoimpedance effect (GMI), an electromagnetic phenomenon with high signal intensity and field sensitivity, has potential applications. For high frequency electromagnetic devices, soft magnetic films with high saturation magnetization and high in-plane uniaxial anisotropy field have become very important research materials. In this dissertation, FeNi/Cu/FeNi films without and with one or two NiZn-ferrite spacers were prepared by magnetron sputtering, and NiZn-ferrite layers were fabricated on the free surface of Fe-based amorphous ribbons for the research of GMI effect. Fe75.5Cu1Nb3Si3.5B7 films were deposited by oblique sputtering, and their high frequency magnetic properties were studied. Main results are as follows: 1. Influence of NiZn-ferrite spacers on GMI in FeNi/Cu/FeNi films: An enhanced GMI effect is observed in the multilayer film with one NiZn-ferrite spacer, while the GMI is not evidently enhanced in the multilayer film with two NiZn-ferrite spacers. 2. Influence of NiZn-ferrite spacers on GMI in Fe-based amorphous ribbons: After the NiZn-ferrite layer coating on the free surface of a Fe-based amorphous ribbon, an enhanced GMI effect was observed in the NiZn-ferrite modified ribbon at all measured frequencies. 3. Adjust of in-plane uniaxial magnetic anisotropy of Fe75.5Cu1Nb3Si3.5B7 films: Films deposited with different oblique angles show in-plane anisotropy. From the ferromagnetic resonance measurement, it is found that there exist double resonance peaks in the films. 4. Adjust of magnetic damping in obliquely sputtered Fe75.5Cu1Nb3Si3.5B7 films: For the films deposited with oblique angle from 3o to 32o, the effective damping parameter is increased with increasing oblique angle. The intrinsic damping parameter basically maintains the value of about 0.016 in the range of 3o to 26o. But when the oblique angle is 32o, the intrinsic damping parameter reaches 0.037.
研究领域 低维材料与微观磁性
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